| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for production of glass hard disc substrates, which includes a polishing process of polishing a glass substrate with an acidic polishing fluid and a subsequent alkali cleaning process, and which can inhibit the surface roughness degradation of the glass substrate in the alkali cleaning process and can attain improved cleanliness while keeping a high polishing rate in the polishing process. <P>SOLUTION: The method for production of the glass hard disc substrate includes: a step (1) of polishing a glass substrate to be polished, using a polishing fluid composition which contains a polyamine compound having 2 to 10 nitrogen atoms in one molecule and has a pH of 1.0 to 4.2; and a step (2) of polishing the substrate polished in the step (1), using a cleaner composition having a pH of 8.0 to 13.0. <P>COPYRIGHT: (C)2012,JPO&INPIT |
