发明名称 |
Apparatus and Method for Anchoring Electrodes in MEMS Devices |
摘要 |
One or more electrodes that interact with a movable mass in a MEMS device are anchored or otherwise supported from both the top and bottom and optionally also from one or more of the lateral sides other than the transduction side (i.e., the side of the electrode facing the mass) in order to severely restrict movement of the electrodes such as from interaction with the mass and/or external forces.
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申请公布号 |
US2012137773(A1) |
申请公布日期 |
2012.06.07 |
申请号 |
US201113308687 |
申请日期 |
2011.12.01 |
申请人 |
JUDY MICHAEL W.;GEEN JOHN A.;JOHARI-GALLE HOURI;ANALOG DEVICES, INC. |
发明人 |
JUDY MICHAEL W.;GEEN JOHN A.;JOHARI-GALLE HOURI |
分类号 |
G01C19/56;H05K13/04 |
主分类号 |
G01C19/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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