| 摘要 |
<p>A projection objective lens system has lenses arranged orderly from the object plane to the image plane: a first lens group (S1) with positive focal power; a second lens group (S2) with negative focal power; a third lens group (S3) with positive focal power; a fourth lens group (S4) with negative focal power; a fifth lens group (S5) with positive focal power. The lens groups are divided into two sub-lens groups. A diaphragm (AS) is provided between the two sub-lens groups. The following conditions are met: 0.12<|L/f|<0.4, and ?R/R<1%, wherein, f is the effective focal length of the projection objective lens system, L is the distance between the object plane and the image plane, ?R is the maximum caliber difference between the light beams irradiated by various viewing fields at the diaphragm, and R is the maximum caliber of the light beam irradiated by the center viewing field of the diaphragm.</p> |
