MICROSYSTEM HAVING A MICROELECTRICAL AND MICROFLUIDIC FUNCTION, AND METHOD FOR MANUFACTURING SAME

摘要

The present invention relates to a microsystem including both a microelectronic and microfluidic function, as well as to a method for manufacturing such a system, which can be used, in particular, with microsystems dedicated to bioanalysis, such as a lab-on-a-chip, a cell-based array, or a DNA or protein chip array (microarray). The method includes a step of creating a microelectronic chip on a first substrate, said chip being capable of implementing the microelectronic function, and a step of creating a microfluidic structure on a second substrate, said structure being capable of implementing the microfluidic function. In addition, the method includes a step of transferring the second substrate onto the electronic circuit and the first substrate, and the step of creating the microfluidic structure is implemented after said step of transferring the second substrate onto the electronic circuit and the first substrate. The method of the invention thus enables the problems associated with assembling a previously produced microfluidic structure with a previously produced microelectronic structure in terms of manufacturing costs, as well as in terms of spatial resolution, to be overcome. Indeed, the assembly is carried out prior to producing the mircofluidic structure by transferring the second substrate, which serves as a base for the microfluidic structure, onto the microelectronic structure. The method of the invention thus makes it possible to create complex microfluidic structures which are assembled with complex microelectronic structures.