发明名称 |
METHOD OF, AND APPARATUS FOR, MEASURING THE MASS FLOW RATE OF A GAS |
摘要 |
There is provided a meter (200; 350) for measuring the mass flow rate of a gas. The meter comprises a conduit (206) through which the gas flows in use. The conduit has a flow restriction orifice (212) through which choked flow occurs in use. The flow restriction orifice divides the conduit into an upstream portion (214) upstream of said orifice and a downstream portion (216) downstream of said orifice. The meter further comprises a sensor assembly (204), the sensor assembly including a piezoelectric crystal oscillator (218) in said upstream portion such that said piezoelectric oscillator is in contact with said gas when the meter in use. The sensor assembly is arranged: to drive the piezoelectric crystal oscillator such that the piezoelectric crystal oscillator resonates at a resonant frequency; to measure said resonant frequency of said piezoelectric crystal oscillator; and to determine, from the resonant frequency, the mass flow rate through the orifice. |
申请公布号 |
CA2817813(A1) |
申请公布日期 |
2012.06.07 |
申请号 |
CA20112817813 |
申请日期 |
2011.11.28 |
申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
DOWNIE, NEIL ALEXANDER |
分类号 |
G01F15/06;G01F1/78;G01F15/04;G01F15/12 |
主分类号 |
G01F15/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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