METHOD OF ALIGNING A SUBSTRATE AND APPARATUS FOR PERFORMING THE SAME

摘要

PURPOSE: A method for arranging a substrate and an apparatus for executing the same are provided to improve manufacture yield of a semiconductor device by drastically shortening time to be required to arrange the substrate. CONSTITUTION: A perception unit(310) successively recognizes first, second, third, and fourth alignment marks according to the degree of definition. The perception unit comprises a display unit(312) for indicating an alignment value. A determination unit(320) determines whether the first, second, third, and fourth alignment marks are arranged according to the alignment value or not. The determination unit comprises an input unit(322) for establishing an alignment limit value. An alignment unit(330) transfers a stage according to a result determined in the determination unit. The alignment unit comprises a horizontal driving unit(332) for transferring the stage along a horizontal direction.