发明名称 INSPECTION METHOD OF SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To solve problems that when a semiconductor element is mounted on a circuit board by using flip chip mounting technique, a joining part between the semiconductor element and the circuit board is not visible and the joining quality is not directly determined, and previously proposed inspection methods are not suitable for determining fine joining states of semiconductor elements mounted by using the flip chip mounting technique. <P>SOLUTION: An LED device 10, in which an LED element 20 is mounted on a circuit board by using flip chip mounting technique, includes a negative electrode 17 and a positive electrode 16. A forward voltage is measured between the positive electrode 16 and the negative electrode 17. Next, only the negative electrode 17 is heated by a heater 25, and the forward voltage is measured again. Finally, the occurence of the connection failure is determined based on measurement values before and after heating. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012109525(A) 申请公布日期 2012.06.07
申请号 JP20110137189 申请日期 2011.06.21
申请人 CITIZEN HOLDINGS CO LTD;CITIZEN ELECTRONICS CO LTD 发明人 SHIRAISHI ATSUSHI;IMAZU KENJI;TERAJIMA KAZUHIKO;TOGASHI SEIGO
分类号 H01L33/00;G01R31/04;H01L21/60 主分类号 H01L33/00
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