发明名称 COATING LIQUID FOR FORMING METAL OXIDE THIN FILM, METAL OXIDE THIN FILM, FIELD EFFECT TRANSISTOR, AND METHOD FOR PRODUCING THE FIELD EFFECT TRANSISTOR
摘要 A coating liquid for forming a metal oxide thin film, the coating liquid including: an inorganic indium compound; at least one of an inorganic magnesium compound and an inorganic zinc compound; and a glycol ether.
申请公布号 WO2012073913(A1) 申请公布日期 2012.06.07
申请号 WO2011JP77444 申请日期 2011.11.22
申请人 RICOH COMPANY, LTD.;NAKAMURA, YUKI;UEDA, NAOYUKI;ABE, YUKIKO;SONE, YUJI 发明人 NAKAMURA, YUKI;UEDA, NAOYUKI;ABE, YUKIKO;SONE, YUJI
分类号 H01L21/336;H01L21/368;H01L29/786 主分类号 H01L21/336
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