发明名称 Photochemical method for manufacturing nanometrically surface-decorated substrates
摘要 The present invention relates to a photochemical method for manufacturing nanometrically surface-decorated substrates, i.e. the creation of periodic and aperiodic patterns of highly ordered inorganic nanostructures on a substrate. This method is based on the selective photochemical modification of a self-assembled monolayer of metal compound loaded polymer core-shell systems on widely variable substrates. Light exposure through an appropriate mask causes selective chemical modification of the polymer core shell system. By subsequently placing the substrate in an appropriate chemical solution that eradicates the non-modified polymer, the pattern given by the used mask is reproduced on the surface. Finally, the remaining organic matrix is removed and metal salt is transformed to the single metal or metal oxide nanodots by means of gas plasma treatment.
申请公布号 EP1760527(B1) 申请公布日期 2012.06.06
申请号 EP20050019237 申请日期 2005.09.05
申请人 DWI AN DER RWTH AACHEN E.V. 发明人 MELA, PETRA;OTT, MARCELL;SPATZ, PROF. DR. JOACHIM;GORZOLNIK, BLAZEJ;MOELLER, PROF. DR. MARTIN
分类号 G03F7/16;G03F7/004;G03F7/033;G03F7/038;H01L21/30 主分类号 G03F7/16
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