| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an atmospheric pressure plasma generating method and device wherein plasma can be blown uniformly from a plurality of reaction tubes and a wide range of plasma treatment can be carried out uniformly and efficiently. <P>SOLUTION: The atmospheric pressure plasma generating method and device has a plurality of reaction tubes 2a, 2b, 2c arranged in parallel which have blowing ports 7a, 7b, 7c at one end and antennas 3a, 3b, 3c arranged at the outer circumference, impresses high frequency voltage on each antenna 3a, 3b, 3c from a common high frequency power supply 4 through a common matching circuit 5 and a common phase circuit 6, and blows plasma 10 from blowing ports 7a, 7b, 7c of each reaction tube 2a, 2b, 2c. By changing the number of winding of the antennas 3a, 3b, 3c at the outer circumference or changing the supply gas quantity based on the arrangement positions of the reaction tubes 2a, 2b, 2c, the intensity of the plasma generated at each reaction tube 2a, 2b, 2c is made nearly the same. <P>COPYRIGHT: (C)2008,JPO&INPIT |
