Mirror device

摘要

Mirror device comprising a mirror which is supported to be pivotable with respect to a mirror substrate, a driving electrode which is formed on an electrode substrate facing said mirror substrate, and a control circuit which applies a voltage to said driving electrode, wherein said driving electrode comprises a plurality of driving electrodes formed on said electrode substrate, and said control circuit controls pivotal movement of said mirror by applying a single bias voltage to said plurality of driving electrodes, and simultaneously, individually applying, to each of said plurality of driving electrodes, a driving voltage necessary for making said mirror pivot.