METHOD AND SYSTEM FOR DETECTING AND CLASSIFYING DEFECTS OF SUBSTRATE

摘要

A method and system for detecting and classifying a defect of a substrate, the system including a first channel, including a first illuminating unit to irradiate a light to a substrate and a first imaging unit to take images by sensing a light from the substrate when it is irradiated; a second channel, including a second illuminating unit to irradiate a light to the substrate and a second imaging unit to take images by sensing a light from the substrate when it is irradiated; an image constructing module to construct two images of the substrate using the images of the first and second imaging units respectively; and an image processing module to detect, when the substrate has a defect, that the defect is a defect on or in the substrate, based on a relationship of positions where the defect of the substrate appears in the two images of the substrate.