Synchronous buck converter using shielded gate field effect transistors

摘要

A synchronous buck converter includes a high-side switch and a low-side switch serially coupled to one another. The low-side switch includes a field effect transistor that comprises: a trench extending into a drift region of the field effect transistor; a shield electrode in a lower portion of the trench, wherein the shield electrode is insulated from the drift region by a shield dielectric; a gate electrode in the trench over the shield electrode, wherein the gate electrode is insulated from the shield electrode by an inter-electrode dielectric; source regions adjacent the trench; a source metal contacting the source regions; and a resistive element having one end contacting the shield electrode and another end contacting the source metal in the field effect transistor.