| 摘要 |
PURPOSE: A sensor device, a motion sensor, and an electronic device are provided to stabilize electrical characteristics of an electronic device and to miniaturize the electronic device. CONSTITUTION: A sensor device(1) comprises a semiconductor substrate(10), a first electrode, an outer connecting terminal(12), a stress compliant layer(15), a connecting terminal, and a sensor element. The first electrode is installed in an active plane side of a semiconductor substrate. The outer connecting terminal is electrically connected to the first electrode, thereby being installed in the active plane side. The stress compliant layer is formed between the semiconductor substrate and the outer connecting terminal. The connecting terminal is installed the active plane side of the semiconductor substrate. The sensor element comprises a base, a vibration unit extended from the base, and a mass controlling unit formed in a vibration unit and a connection unit. |
