发明名称 |
Method for manufacturing multiple layers of waveguides |
摘要 |
A method for manufacturing multiple layers of waveguides is disclosed. Initially, a first cladding layer is deposited on a substrate, a first inner cladding layer is then deposited on the first cladding layer, and a first waveguide material is deposited on the first inner cladding layer. The first inner cladding layer and the first waveguide material are then selectively etched to form a first waveguide layer. Next, a second inner cladding layer followed by a second cladding layer are deposited on the first waveguide layer. The second inner cladding layer and the second cladding layer are removed by using a chemical-mechanical polishing process selective to the first waveguide material. A third inner cladding layer followed by a second waveguide material are deposited on the first waveguide material. The third inner cladding layer and the second waveguide material are then selectively etched to form a second waveguide layer. Finally, a fourth inner cladding layer followed by a third cladding layer are deposited on the second waveguide layer. |
申请公布号 |
US8192638(B2) |
申请公布日期 |
2012.06.05 |
申请号 |
US20080517692 |
申请日期 |
2008.08.29 |
申请人 |
POMERENE ANDREW T. S.;CONWAY TIMOTHY J.;HILL CRAIG M.;JASO MARK;BAE SYSTEMS INFORMATION AND ELECTRONIC SYSTEMS INTEGRATION INC. |
发明人 |
POMERENE ANDREW T. S.;CONWAY TIMOTHY J.;HILL CRAIG M.;JASO MARK |
分类号 |
B29D11/00;G02B6/10;G02F1/00 |
主分类号 |
B29D11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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