发明名称 Method for evaluating efficacy of prevention maintenance for a tool
摘要 A method for evaluating efficacy of prevention maintenance for a tool includes the steps of: choosing a tool which has been maintained preventively and choosing a productive parameter of the tool; collecting values of the productive parameter generated from the tool during a time range for building a varying curve of the productive parameter versus time, modifying the varying curve with a moving average method; transforming the varying curve into a Cumulative Sum chart; and judging whether the values of the productive parameter generated from the tool after the prevention maintenance are more stable, compared with the values of the productive parameter generated from the tool before the prevention maintenance, according to the Cumulative Sum chart. Thereby, if the varying of the values of the productive parameter after the prevention maintenance isn't stable, then the efficacy of this prevention maintenance for the tool is judged not good.
申请公布号 US8195431(B2) 申请公布日期 2012.06.05
申请号 US20090566974 申请日期 2009.09.25
申请人 LEE YI FENG;CHEN CHUN CHI;KAO SHIH CHANG;TIAN YUN-ZONG;CHEN WEI JUN;INOTERA MEMORIES, INC. 发明人 LEE YI FENG;CHEN CHUN CHI;KAO SHIH CHANG;TIAN YUN-ZONG;CHEN WEI JUN
分类号 G06F15/00;G06F19/00 主分类号 G06F15/00
代理机构 代理人
主权项
地址