发明名称 |
Remote hydrogen plasma with ion filter for terminating silicon dangling bonds |
摘要 |
Apparatus and methods for repairing silicon dangling bonds resulting from semiconductor processing are disclosed. The silicon dangling bonds can be repaired by introducing hydrogen radicals with substantially no hydrogen ions into the processing chamber to react with the silicon dangling bonds, eliminating them.
|
申请公布号 |
US8193075(B2) |
申请公布日期 |
2012.06.05 |
申请号 |
US20100757341 |
申请日期 |
2010.04.09 |
申请人 |
XU ZHI;APPLIED MATERIALS, INC. |
发明人 |
XU ZHI |
分类号 |
H01L21/322 |
主分类号 |
H01L21/322 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|