SUSCEPTOR AND SEMICONDUCTOR MANUFACTURING DEVICE

摘要

PURPOSE: A susceptor and an apparatus for manufacturing a semiconductor are provided to prevent a susceptor of a carbon material from being damaged by chemical cleaning using hydrofluoric acid by coating a silicon carbide or an aluminum nitride film on a surface of the susceptor. CONSTITUTION: A susceptor(23) is formed into a single layer structure including an upper side contacting a substrate. One or more pockets(230) are formed on an upper side of the susceptor. One or more pockets are rotated by a rotary shaft(26) combined with a lower portion thereof. A bottom side(250) of the pocket is formed to be convex or concave. The rotary shaft is combined with a coupling groove of the rotary shaft formed in a lower portion of the susceptor.