发明名称 |
Vertical cavity surface emitting laser having multiple top-side contacts |
摘要 |
A VCSEL with undoped mirrors. An essentially undoped bottom DBR mirror is formed on a substrate. A periodically doped first conduction layer region is formed on the bottom DBR mirror. The first conduction layer region is heavily doped at a location where the optical electric field is at about a minimum. An active layer, including quantum wells, is on the first conduction layer region. A periodically doped second conduction layer region is connected to the active layer. The second conduction layer region is heavily doped where the optical electric field is at a minimum. An aperture is formed in the epitaxial structure above the quantum wells. A top mirror coupled to the periodically doped second conduction layer region. The top mirror is essentially undoped and formed in a mesa structure. An oxide is formed around the mesa structure to protect the top mirror during wet oxidation processes. |
申请公布号 |
US8193019(B2) |
申请公布日期 |
2012.06.05 |
申请号 |
US20100917449 |
申请日期 |
2010.11.01 |
申请人 |
JOHNSON RALPH H.;PENNER R. SCOTT;BIARD JAMES ROBERT;FITZGERALD COLBY;FINISAR CORPORATION |
发明人 |
JOHNSON RALPH H.;PENNER R. SCOTT;BIARD JAMES ROBERT;FITZGERALD COLBY |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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