发明名称 |
Ring-shaped baffle assembly |
摘要 |
PURPOSE: An annular baffle assembly is provided to improve durability of a product by forming and upper frame and a lower frame into one body using the same aluminum material. CONSTITUTION: An upper frame(10) is formed into an opened annular shape. A power source connection part(11) is formed by connecting a power source and one upper side of the circumferential surface of the upper frame. A lower frame(20) supports the upper frame. A heater(30) supplies constant heat for activating work gas using plasma. A frame connection part(40) bonds and fixes the upper frame and the lower frame.
|
申请公布号 |
KR20120056417(A) |
申请公布日期 |
2012.06.04 |
申请号 |
KR20100117941 |
申请日期 |
2010.11.25 |
申请人 |
WIZIT CO., LTD. |
发明人 |
SONG, YOUNG JU;PARK, SANG WON;JEONG, DEUK HWAN |
分类号 |
H01L21/3065 |
主分类号 |
H01L21/3065 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|