发明名称 Ring-shaped baffle assembly
摘要 PURPOSE: An annular baffle assembly is provided to improve durability of a product by forming and upper frame and a lower frame into one body using the same aluminum material. CONSTITUTION: An upper frame(10) is formed into an opened annular shape. A power source connection part(11) is formed by connecting a power source and one upper side of the circumferential surface of the upper frame. A lower frame(20) supports the upper frame. A heater(30) supplies constant heat for activating work gas using plasma. A frame connection part(40) bonds and fixes the upper frame and the lower frame.
申请公布号 KR20120056417(A) 申请公布日期 2012.06.04
申请号 KR20100117941 申请日期 2010.11.25
申请人 WIZIT CO., LTD. 发明人 SONG, YOUNG JU;PARK, SANG WON;JEONG, DEUK HWAN
分类号 H01L21/3065 主分类号 H01L21/3065
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