EXPOSURE HEAD OF MASKLESS EXPOSURE APPARATUS

摘要

PURPOSE: The exposure head of a maskless exposing apparatus is provided to cost effectively manufacture an exposure optical system and to reduce the size of the exposure optical system. CONSTITUTION: The exposure head(200) of a maskless exposing apparatus includes a plurality of light illumination optical system(210A, 210B), a plurality of spatial light modulators(230A, 230B), a plurality of projection optical systems(232A, 232B), and an exposure optical system(240). The spatial light modulators selectively reflect light from the light illumination optical systems according to the shape of patterns on a substrate. The projection optical systems obtain projected images based on the reflected light. The exposure optical system transfers light through the projection optical systems to the substrate. A plurality of spatial light modulators faces each other.