APPARATUS TO ANALYZING GROUP CHARACTERISTIC OF ION BEAM

摘要

PURPOSE: A collective ion beam property analysis apparatus is provided to reduce space restrictions by reliably measuring the collective properties of an ion beam by using a single apparatus. CONSTITUTION: A collective unit(120) is installed within a main body. An ion beam is directed into the collective unit. The focusing unit collects ions or electrons generated by colliding the ion beam with residual gas which is kept in an internal space. A charge quantity/distribution measuring unit(150) is connected to the collective unit within the main body. The charge quantity/distribution measuring unit amplifies and measures charge quantities and the distribution of the ions or the electrons. An energy measuring unit(140) is installed within the main body.