| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface defect inspection device with improved detection accuracy of surface defects by accurately discriminating the surface defect from a water droplet existing on a surface of a workpiece. <P>SOLUTION: The surface defect inspection device 1 includes an illumination device 3 which radiates illumination light toward an inspection object surface 10a of the workpiece 10 being a detection object of a surface defect; a camera 2 for imaging the inspection object surface 10a; and an image processing device 4 which performs image processing of image data imaged by the camera 2 and detects a surface defect 5 of the inspection object surface 10a of the workpiece 10. The illumination device 3 radiates diffusion illumination light X which is diffusion reflected illumination light to the inspection object surface 10a. The image processing device 4 detects the surface defect 5 on the inspection object surface 10a of the workpiece 10 based on the image data obtained by imaging, by the camera 2, the inspection object surface 10a to which the diffusion illumination light X is radiated by the illumination device 3. <P>COPYRIGHT: (C)2012,JPO&INPIT |
