| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate housing container including supporting parts in the container body, each of which supports a regulation plate for letting a thin substrate avoid deflection, also the substrate housing container preventing the regulation plate from rotation, decreasing friction between the regulation plate and the supporting parts, and making a substrate easy to be taken out. <P>SOLUTION: A substrate housing container comprises: a container body including an opening part at a front face thereof; and a pair of supporting parts facing each other at an inner wall of the container body. Each supporting part includes a plurality of supporting plates lining up in a vertical direction. A regulation plate is placed on a pair of supporting plates at a same level in supporting parts, and a substrate is placed on other supporting plates which is one upper stage of the supporting plates having the regulation plate thereon. The regulation plate has a cutout from the opening part side of the housing container toward a center part, as planarly viewed, and is provided with simple positional regulation means for being regulated a position thereof against the supporting plates supporting the regulation plate. <P>COPYRIGHT: (C)2012,JPO&INPIT |
