| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser irradiation device that accurately irradiates an object with a laser beam by adjusting the reference position of a secondary mirror and adjusting displacement from an afocal state that occurs in the space between a primary mirror and the secondary mirror. <P>SOLUTION: The laser irradiation device comprises: a detection system 30 configured to detect whether light emitted from a reflection optical system 10 is parallel light or not; a position sensor 40 configured to detect the position of a secondary mirror 12 in the direction of an optical axis; a distance meter configured to measure the distance to an object; a drive mechanism 60 configured to move the secondary mirror 12 along the optical axis; and a control device 70 using, as a reference position, the position of the secondary mirror 12 detected by the position sensor 40 when the emission light is detected as parallel light, configured to calculate the amount and direction of movement of the secondary mirror 12 from the reference position in order to condense laser beam onto an object according to the distance to the object, and controlling the drive of the drive mechanism 60 based on the calculation result. The object is irradiated with the laser beam via a reflection optical system 10 in which a space between the primary mirror 11 and the secondary mirror 12 is adjusted to a distance by which the laser beam is accurately condensed on the object. <P>COPYRIGHT: (C)2012,JPO&INPIT |
