发明名称 METHOD OF FORMING TiO2 ARRAY USING ZnO TEMPLATE
摘要 Provided is a method of forming a method of forming a titanium dioxide (TiO2) array using a zinc oxide (ZnO) template. In the method, polymer nanopatterns are formed on the substrate, and monomolecular monolayers are formed between the polymer nanopatterns on the substrate. A seed layer pattern is formed between the monomolecular monolayers on the substrate, and a zinc oxide template is formed by growing zinc oxide on the seed layer.
申请公布号 US2012135597(A1) 申请公布日期 2012.05.31
申请号 US201113292108 申请日期 2011.11.09
申请人 JUNG MI HEE;KANG MAN GU;ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 JUNG MI HEE;KANG MAN GU
分类号 H01L21/28 主分类号 H01L21/28
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