| 摘要 |
<p>This substrate transport device is provided with a lower side arm (51) that carries a substrate (26) to which a polyimide film has been applied into a drying furnace for drying the polyimide film by heating and a lower side arm pad (61) attached to the lower side arm (51). The lower side arm pad (61) has a base part (62), which is affixed to the lower side arm (51), and a mounting part (64) on which the substrate (26) is mounted. The base part (62) has a top face (63). The mounting part (64) protrudes from a portion of the top face (63) in a direction away from the lower side arm (51). Because of this constitution, a substrate transport device that achieves uniform drying of a liquid film applied on a substrate is provided.</p> |
