| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a noncontact electrostatic chuck that holds even a soft, thin workpiece with low stiffness in a noncontact manner without causing a regional deformation in the workpiece. <P>SOLUTION: A noncontact electrostatic chuck 1 allows a workpiece to be floated by air discharged from a nozzle 4 provided on a base surface 2a, and also allows the workpiece to be attracted to the base 2a by electrostatic force by applying voltages to electrodes 3 provided on the base surface 2a. The nozzle 4 surrounds at least part of a region where the electrodes 3 are provided, and extends at an angle with respect to the base surface 2a so as to open on the base surface 2a toward inside of the surrounded region X. Depending on distances from center thereof, the region X is divided into a plurality of subregions (X1, X2, X3, and X4). The noncontact electrostatic chuck 1 has an electrostatic force regulator 9 that controls electrostatic force independently in the respective subregions. <P>COPYRIGHT: (C)2012,JPO&INPIT |
