| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a probe card surely supporting wire probes and facilitating the replacement and assembling thereof. <P>SOLUTION: This probe card includes a plurality of wire probes electrically contacting with respective electrodes of a subject. A support substrate for supporting the respective wire probes includes: a rigid support member that has upper support holes and lower support holes for positioning and supporting the upper parts and the lower parts of the respective wire probes; and a sheet-like support member that supports intermediate parts of the respective wire probes and, when the upper support holes for supporting the upper parts of the wire probes and the lower support holes for supporting the lower parts of the wire probes are fixed while shifting from each other, supports them to deflect all of the intermediate parts of the respective wire probes in one direction, has flexibility and includes a reinforcing film formed on the surface. <P>COPYRIGHT: (C)2012,JPO&INPIT |
