DIGITAL HOLOGRAM SENSOR SYSTEM FOR PHOTOGRAPHING PLASMA PARTICLES

摘要

PURPOSE: A digital hologram sensor system for photographing plasma particles is provided to easily magnify magnification of a CCD(Charge Coupled Device) camera by using a compound lens including one or more convex lens along with a macro lens. CONSTITUTION: A CCD(Charge Coupled Device) camera(110) is arranged in one side of a plasma chamber(10). The CCD camera obtains the 3D space distribution of plasma particles in the plasma chamber. A compound lens(120) is combined with the front of the CCD camera. The compound lens includes a macro lens and one or more convex lens. A monitoring and diagnostic part(140) monitors and diagnoses a plasma state.