| 摘要 |
The present invention improves mechanical strength of an electrode and provides an EL device etc. with excellent durability. An EL device includes a pair of electrodes 11 and 12 on a substrate 2, and a light emitting layer 15 provided between the electrodes 11 and 12. One of the pair of electrodes 11 and 12 is a metal electrode. The metal electrode is a multilayer including a lower layer 20 of aluminum metal and an upper layer 21 of nickel metal formed above the lower layer. Only the upper layer 21 of the lower layer 20 and the upper layer 21 contains a nitrogen element derived from sputtering gas. As the material of the upper layer 21, for example, an alloy of nickel and copper is preferable.
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