MICROPUMP AND SEMICONDUCTOR DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a micropump autonomously operating without supply of electric energy from the outside.

SOLUTION: This micropump includes: a high temperature side member located on a heat source side; a low temperature side member located on a heat radiation side; an intermediate layer located between the high temperature side member and the low temperature side member; and a chamber forming a part of a flow passage between the intermediate layer and the low temperature side member. The intermediate layer includes: a diaphragm; and displacement means for displacing the diaphragm by heat absorption from the high temperature side member and heat radiation from the low temperature side member. The diaphragm displaces between a first position before displacement and a second position in contact with the low temperature side member by the displacement to take in fluid into the chamber and discharge fluid from the chamber.

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