| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a scanning electron microscope capable of setting an AP for improved matching accuracy. <P>SOLUTION: The scanning electron microscope is designed to obtain an EP image based on a photographing recipe including information on an AP which is set in the periphery of an EP for positioning purposes before the EP on a sample is observed. The scanning electron microscope comprises: an information acquisition unit which acquires information including the position of the AP and the design data of the sample; a pattern analysis unit which, based on the information, determines whether the pattern included in an FOV of the AP is a closed diagram or not; a position adjustment unit which, when the pattern included in an FOV of the AP is a closed diagram and a rectangular region enclosing the closed diagram is included in an FOV of the AP, moves the AP until the closed diagram having a largest number of vertexes is at center of the AP, or, when the rectangular region enclosing the closed diagram is not included in the FOV of the AP, moves the AP to a position at which there is a largest number of vertexes in the closed diagram; and a photographing recipe registration unit which registers the optimized AP position in a photographing recipe. <P>COPYRIGHT: (C)2012,JPO&INPIT |
