| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wafer storage cassette which has no fear of breaking a wafer and/or carrying means. <P>SOLUTION: A wafer storage cassette 32 capable of storing a plurality of wafers, comprises a cassette body 33 which is formed with plural pairs of storage shelves 56 having equal height on right and left sides and storing the wafers, on inner surfaces of a pair of opposite side walls 33a and 33b, and has an opening portion 54 for taking the wafers into/out from the storage shelves 56 on a front surface; a wafer storage auxiliary plate 62 which is detachably attached to the cassette body 33 to cover the opening portion 54, and has a plurality of penetrating slits 64 corresponding to the plural pairs of the storage shelves 56; and engaging means for detachably engaging the cassette body 33 and the wafer storage auxiliary plate 62. <P>COPYRIGHT: (C)2012,JPO&INPIT |
