| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate processing apparatus in which safety is enhanced by displaying occurrence of a corrupted file, as required, on the operation screen after starting a main controller thereby prompting a warning. <P>SOLUTION: The main controller 240 of the substrate processing apparatus 1 is configured to display a corrupted file list dialogue on an operation terminal 241 after startup and not to execute a recipe if corruption of a parameter file used during execution of the recipe is discovered at the time of turn on. Even if a recipe start button is depressed, only an alarm message is displayed and the recipe start button is disabled. <P>COPYRIGHT: (C)2012,JPO&INPIT |
