发明名称 METHOD AND APPARATUS FOR PLASMA INDUCED COATING AT LOW PRESSURE
摘要 The invention provides a method for plasma coating at low pressure with a water and oil repellent polymer layer. The method comprises the steps of: providing a substrate with a surface, vaporizing a compound comprising 1H, 1H, 2H, 2H-Perflourodecyl acrylate into a stream of inert gas, maintaining a constant temperature in the compound during the evaporation into the gas, exposing said surface to the mixture of gas and compound, exposing said surface to a continuous plasma generated in the gas and compound mixture, having a plasma power provided by a plasma circuit.
申请公布号 US2012135163(A1) 申请公布日期 2012.05.31
申请号 US201113283705 申请日期 2011.10.28
申请人 OELLGAARD MOGENS 发明人 OELLGAARD MOGENS
分类号 C23C16/50;C23C16/448;C23C16/52 主分类号 C23C16/50
代理机构 代理人
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