METHOD AND APPARATUS FOR PRODUCING CRYSTAL SEMICONDUCTOR

摘要

PROBLEM TO BE SOLVED: To provide a method and apparatus for producing a crystal semiconductor that reduce the facility cost by extending the life of a carbon heater or a carbon component in a furnace and produce a high-quality crystal semiconductor.

SOLUTION: In this method for producing the crystal semiconductor, semiconductor melt stored in a crucible arranged in a chamber is cooled from the bottom of the crucible to be solidified, and a crystal semiconductor is grown up. This method includes: a moisture removing process S10 of reducing the pressure in the chamber to 10-4Pa or lower and removing the moisture in the chamber; a gas introducing process S20 of introducing inert gas into the chamber; a dissolving process S30 of heating and dissolving, with a heater, semiconductor raw material stored in the crucible to produce semiconductor melt; and a growing process S40 of cooling the crucible from the bottom to solidify the semiconductor melt and grow the crystal semiconductor.

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