| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ozone generator in which efficiency in generating ozone is improved without complicating its configuration. <P>SOLUTION: First electrodes 5a to 5c and a second electrode 6 are arranged at intervals in a reaction chamber 2 of the ozone generator 1, and discharge regions 7a to 7c are formed between these electrodes. When voltages are applied to portions between these electrodes, electrical discharges occur in the discharge regions 7a to 7c, and the ozone is generated from oxygen contained in a first feed gas that is supplied into the reaction chamber 2 through a main supply path 3. Meanwhile, a sub-supply path 9 is connected to a side portion of the reaction chamber 2, wherein a second feed gas that contains the oxygen is supplied at least partially to downstream sides of the discharge regions 7a to 7c from branched paths 11a to 11c of the sub-supply path. <P>COPYRIGHT: (C)2012,JPO&INPIT |
