| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress deformation of substrates. <P>SOLUTION: An elastic wave device includes: a support substrate 10 of lithium tantalate; an element substrate 12 of lithium tantalate disposed on an upper surface of the support substrate and bonded at a lower surface to the upper surface of the support substrate 10; and an interdigital electrode formed on an upper surface of the element substrate. A propagation direction of an elastic wave in the element substrate is an X axis. A normal direction of the upper surface of the support substrate is an X axis, and the propagation direction of the elastic wave is not parallel with a Z axis of the support substrate. <P>COPYRIGHT: (C)2012,JPO&INPIT |
