| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for removing surely a deposit and a contaminant on an inner face of a reactor (bell jar) used in production of polycrystalline silicon. <P>SOLUTION: The reactor (bell jar) 1 used in production of the polycrystalline silicon is mounted on a pan 2 via a rubber packing 3. The bell jar 1 of a state mounted on the pan 2 includes, in its inside, a nozzle 4 for making a fine ice particle collide with the inner face of the bell jar 1, while keeping a fixed distance and angle, a hose 5 for feeding the fine ice particle and pure water to the nozzle 4, and a shaft 6 having a rotary mechanism for moving a position of the nozzle 4. The fine ice particle is formed by an icemaker 10. The fine ice particle has preferably about 0.3-3.0 mm of maximum size. The fine ice particle is fed to the nozzle 4, for example, by compressed air 8 having 0.5-1 MPa of pressure. The angle for making the fine ice particle collide with the inner face of the bell jar 1 from the nozzle 4 is preferably 30-60° in the method. <P>COPYRIGHT: (C)2012,JPO&INPIT |
