发明名称 Thin-Layer Encapsulation for an Optoelectronic Component, Method for the Production Thereof, and Optoelectronic Component
摘要 A thin-layer encapsulation (1) for an optoelectronic component. The thin-layer encapsulation (1) comprises a sequence of layers (2) that comprises the following layers: a first ALD layer (3) deposited by means of atomic layer deposition, and a second ALD layer (4) deposited by means of atomic layer deposition. A method is disclosed for producing the thin-layer encapsulation and an optoelectronic component is disclosed having such a thin-layer encapsulation.
申请公布号 US2012132953(A1) 申请公布日期 2012.05.31
申请号 US201013260560 申请日期 2010.03.22
申请人 BECKER DIRK;DOBBERTIN THOMAS;LANG ERWIN;REUSCH THILO 发明人 BECKER DIRK;DOBBERTIN THOMAS;LANG ERWIN;REUSCH THILO
分类号 H01L23/28;H01L21/56;H01L51/44;H01L51/52 主分类号 H01L23/28
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