COMBINING DEVICE OF SURFACE ACOUSTIC WAVE SENSOR AND ACTUATOR, ULTRA-PRECISION TRANSFER APPARATUS USING THIS

摘要

PURPOSE: A surface acoustic wave sensor, a driver integrating device, and an ultras precise transfer device using the same are provided to accurately control the location of a movable device or object by sensing an overlapped area or gap change between the movable device and a fixed device. CONSTITUTION: A pair of first and second electrodes(120,130) are patterned on a substrate, generate a surface acoustic wave by receiving an external voltage signal and absorbs the surface acoustic wave transmitted through the substrate. A slider(140) is contacted with or compressed between the first and second electrodes and linearly moves by the surface acoustic wave formed on the surface of the substrate. A moving device(151) is connected to a slider and is electrically connected to one terminal of an electrode which absorbs the surface acoustic wave. A fixed device(152) is electrically connected to other terminal of the electrode.