| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma device for securely igniting plasma for a long period. <P>SOLUTION: A plasma device comprises a hollow structure (11) having a hollow structure in an axial direction, a first electrode (12) placed in the hollow structure (11), and a second electrode (14) covering a plasma-generating region (13) of the hollow structure (11) from an external surface. The first electrode (12) has a modification structure (12b) on the plasma-generating region of the hollow structure. <P>COPYRIGHT: (C)2012,JPO&INPIT |
