METHOD FOR FABRICATING MICRO- OR NANO-SIZED PATTERNS USING LIQUID CRYSTAL DEFECT STRUCTURE

摘要

PURPOSE: A method for forming micro-sized or nano-sized patterns using a liquid crystal defect structure is provided to simply adjust the phase of the defect of liquid crystals to become the height of external electronic field, magnetic field, or a liquid crystal molecular layer. CONSTITUTION: A liquid crystal molecular layer is formed on a substrate. A regular structure is formed on the liquid crystal molecular layer according to the defect structure of liquid crystal molecules. Micro-sized or nano-sized patterns are formed at photo-resist using the regular structure of the liquid crystal molecular layer as a photo mask. A surface treating process is implemented before the liquid crystal molecular layer is formed on the substrate in order to adjust the orientation of liquid crystal molecules on the substrate.