| 摘要 |
A semiconductor process sensor to characterize a semiconductor process by which the semiconductor process sensor was formed. The semiconductor process sensor includes a constant reference voltage source to provide a constant reference voltage signal, a process sensing resistor, a constant current source, and an analog-to-digital converter. The process sensing resistor has a first terminal electrically coupled to the constant reference voltage source and a second terminal to provide a sensed voltage signal, the process sensing resistor having a resistance that is dependent on at least one variation in the semiconductor process used to form the semiconductor process sensor. The constant current source is electrically coupled to the second terminal of the process sensing resistor. The analog-to-digital converter is coupled to the second terminal of the process sensing resistor to provide at least one output signal characterizing the semiconductor process by which the semiconductor process sensor was formed. |
