| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a treatment device which properly treats and recovers reaction exhaust gas which is by-produced at the production of silicon by a zinc reduction method for reducing silicon tetrachloride by using zinc, and manufacturing high-purity silicon. <P>SOLUTION: In the treatment of the produced exhaust gas at the production of silicon by the zinc reduction method, the treatment device of exhaust gas comprises: a gas absorption dissolution mechanism which introduces the produced exhaust gas from the upper part of a tower in which a zinc chloride aqueous solution is made to circulate, and absorbs it; a circulation mechanism of the zinc chloride aqueous solution; a filter mechanism of the zinc chloride aqueous solution, which has absorbed the produced exhaust gas; a density adjustment mechanism of the zinc chloride aqueous solution which has absorbed the produced exhaust gas; and a holding mechanism of the zinc chloride aqueous solution which has performed the treatment. <P>COPYRIGHT: (C)2012,JPO&INPIT |
