| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate processing apparatus which displays a process chamber, which is firstly used in the next sorting production, on an operation screen in advance. <P>SOLUTION: In the case where a given number of substrates (lot) are sequentially processed, a control controller provides information, which specifies a process chamber where a substrate to be transferred next is processed, to an operation part controller, when the given number of substrates are processed. Then, the operation part controller displays an icon on an operation screen, specifying the process chamber to which the substrate to be processed next is transferred, from among multiple process chambers. <P>COPYRIGHT: (C)2012,JPO&INPIT |
