| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor testing apparatus with an improved electrostatic resistance. <P>SOLUTION: A semiconductor testing apparatus comprises: one or a plurality of signal output parts for outputting an electric signal to a device to be measured; a semiconductor relay, which is provided corresponding to the signal output part, for switching between on and off of an electrical connection between the signal output part and the device to be measured; and a control part for turning the semiconductor relay on before a direct or indirect connection with the device to be measured. Furthermore, before the direct or indirect connection with the device to be measured, a voltage of 0 V can be output from the signal output part. <P>COPYRIGHT: (C)2012,JPO&INPIT |
