COAXIAL INTERFEROMETER AND INSPECTION PROBE

摘要

An optical probe has optical components of an interferometer and includes an optical axis, at least one optical source for emitting light along an illumination path that is at least partially coaxial with the optical axis, a first beam splitter and a first lens. The first beam splitter intersects the optical axis and splits the light from the at least one optical source into a first beam for traveling along a reference path that is coaxial with the optical axis to a reference surface and a second beam for traveling along a test path that is coaxial with the optical axis to a specimen. The first lens is interposed along the reference path.