| 发明名称 |
Characterizing Dimensions of Structures Via Scanning Probe Microscopy |
| 摘要 |
A method comprising characterizing the dimensions of structures on a semiconductor device having dimensions less than approximately 100 nanometers (nm) using one of scanning probe microscopy (SPM) or profilometry. |
| 申请公布号 |
US2012137396(A1) |
申请公布日期 |
2012.05.31 |
| 申请号 |
US201213358394 |
申请日期 |
2012.01.25 |
| 申请人 |
ROGERS DUNCAN M.;UKRAINTSEV VLADIMIR A.;TEXAS INSTRUMENTS INCORPORATED |
发明人 |
ROGERS DUNCAN M.;UKRAINTSEV VLADIMIR A. |
| 分类号 |
G01Q60/10;G01Q60/00;G01Q60/18;G01Q60/24 |
主分类号 |
G01Q60/10 |
| 代理机构 |
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代理人 |
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